Integrated micro ammonia sensors with zinc oxide
碩士 === 國立中興大學 === 機械工程學系所 === 98 === The study presents a micro ammonia sensor integrated with readout circuit, manufactured by the commercial 0.35 μm complementary metal oxide semiconductor process. Zinc oxide prepared by the hydrothermal method is adopted as the ammonia sensing film. The advantage...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
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Online Access: | http://ndltd.ncl.edu.tw/handle/58603721597563684856 |