Integrated micro ammonia sensors with zinc oxide

碩士 === 國立中興大學 === 機械工程學系所 === 98 === The study presents a micro ammonia sensor integrated with readout circuit, manufactured by the commercial 0.35 μm complementary metal oxide semiconductor process. Zinc oxide prepared by the hydrothermal method is adopted as the ammonia sensing film. The advantage...

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Bibliographic Details
Main Authors: Ming-Zhi Yang, 楊閔智
Other Authors: Ching-Liang Dai
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/58603721597563684856