Integrated micro humidity sensor and micro carbon monoxide with cobalt oxide
碩士 === 國立中興大學 === 機械工程學系所 === 98 === The study presents a micro humidity sensor and a micro carbon monoxide (CO) sensor integrated with readout circuit on chip, which that is manufactured by the commercial 0.35 um complementary metal oxide semiconductor (CMOS) process and a post-process. The humidit...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/75141347459591007881 |