Hermetically carbon-coated optical fibers prepared by thermal chemical vapor deposition enhanced with inductively coupled plasma of different radio-frequency powers
碩士 === 國立中興大學 === 材料科學與工程學系所 === 98 === This study investigates the effects of different radio-frequency (rf) powers on the properties of carbon coatings on optical fibers that are prepared by thermal chemical vapor deposition enhanced with inductively coupled plasma. Methane (16 sccm) and nitrogen...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
|
Online Access: | http://ndltd.ncl.edu.tw/handle/55956265831234840527 |