Effect of annealing temperature on Al-doped ZnO thin films
碩士 === 明新科技大學 === 光電科技產業研發碩士專班 === 99 === Abstract Zinc oxide (ZnO) thin films with a strong c-axis preferred orientation, obvious piezoelectric and piezo-optical effects, have been used in acousto-electric and acousto-optical devices. In this study, Aluminum-doped zinc oxide films were prepared by...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31443783881392836157 |