Effects of Experimental Parameters and Masks on the Film Thickness Uniformity in E-gun Evaporation Systems
碩士 === 明新科技大學 === 光電科技產業研發碩士專班 === 98 === The performance of an optical coating for most applications depends on its thickness. A good uniform distribution of film thickness is necessary for coatings over the areas of the substrate holders or substrates of a thermal evaporation PVD unit. It represen...
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| Format: | Others |
| Language: | zh-TW |
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2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53440770581275409620 |