Automatic Image Alignment System and Defect Inspection of Wafer Surface and Optical Mask by Using Probability Neural Network With Image Operations
碩士 === 明新科技大學 === 精密機電工程研究所 === 99 === This research proposes self-learning methods to inspect defects of wafer surfaces and optical masks by using probability neural network (PNN) with image operations. The research includes the integration of mechanical, optical and electronic hardware, and develo...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02666418127231131041 |