Development of Mirau interferometer microscope
碩士 === 明道大學 === 光電暨能源工程學系碩士班 === 98 === This thesis is based on developing the Mirau objective with the specifications of 10X magnification, NA 0.28, working distance 33.5 mm and distortions 0.01 %. By using the white light interferometer applying to nanometer-scale metrology, the purpose of this wo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50190314288540736052 |