Treatment of Wastewater Including H2O2 from Wet Clean Process and ECP Process by Activated Carbon and Activated Carbon with Copper ion Individually In IC industry
碩士 === 崑山科技大學 === 環境工程研究所 === 98 === Treatment of wastewater including H2O2 from wet clean process and ECP process by activated carbon and activated carbon with copper ion individually In IC industry will be carried out in this study. The research will be studied under various solution pH values, ty...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46172610492569448688 |