Examining Responses of Electrostatic Micro-Bridge Beams by Methods of Simulation and Experiment

• Main Authors: Chun-Jie Li, 李春桔
• Other Authors: Wei-Hsin Gau
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/62403905522806649008

碩士 === 華梵大學 === 機電工程學系博碩專班 === 98 === In this paper, electrostatic micro-bridge beams with modal electrodes and full coverage electrodes through the process of fabrication are used to examine the static and dynamic responses by methods of finite element and experimental measurement. In the theoretical analysis, the maximum deflection of micro-bridge beams subjected to electrostatic forces due to the top and bottom electrodes can be defined. Natural frequencies of micro-bridge beams can also be obtained by using the Bernouli’s beam theory. In the finite element analysis, the software COMSOL is used to simulate the deflection-curve of micro-bridge beams subjected to electrostatic forces. It shows errors of the deflection and the first natural frequency of beams obtained from the methods of theory and finite element are less than 1% and 2.8%. In the experimental measurement, the natural frequency and the related full mode shape of micro-bridge beams with modal electrodes and full coverage electrodes can be obtained by using the holographic micro-scope laser interferometer. Effects of voltages on the vibration of the electrostatic micro-bridge beam with modal electrodes and full coverage electrodes can be examined. It is shown that errors of the first natural frequency of micro-bridge beams with modal electrodes and full coverage electrodes obtained from theory and measurement are less than 4.4% and 1.8%. Keywords：electrostatic micro-bridge beams, modal electrodes, full coverage electrodes, holographic micro-scope laser interferometer