Examining Responses of Electrostatic Micro-Bridge Beams by Methods of Simulation and Experiment
碩士 === 華梵大學 === 機電工程學系博碩專班 === 98 === In this paper, electrostatic micro-bridge beams with modal electrodes and full coverage electrodes through the process of fabrication are used to examine the static and dynamic responses by methods of finite element and experimental measurement. In the theoretic...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/62403905522806649008 |