Investigation of Dynamic Responses of Micro-Bridge Electrostatic Modal Actuators by the Micro Laser Doppler Interferometry
碩士 === 華梵大學 === 機電工程學系博碩專班 === 98 === A electrostatic micro modal actuator adopted the orthogonality of the mode shape of the microstructure is fabricated. The construction of the micro actuator is designed as the micro bridge beam which is subjected to the fixed and fixed boundary. By using the des...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/20763205247263149388 |