Study of TiO2 film application UV senses with low temperatures fabricate
碩士 === 華梵大學 === 電子工程學系碩士班 === 98 === In this thesis, TiO2 used the RF-sputtering technology was adopted to fabricate resistor-type UV detector. It improves sol-gel processing for substrates low coherence, low power responsibility etc. Two parts were discussed in this study. Part one, vertical and l...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06673868625827594628 |