Fabrication and DeformationAnalysis of Micro Bow ShapeStructure
碩士 === 逢甲大學 === 機械工程學所 === 98 === A micro bow shape structure by silicon based micromachining is designed and analyzed in this thesis. The devices are fabricated by MEMS process. In this study, deflections of micro bow shape structure with different dimensions under various loads are investigat...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/11957057163481525088 |
| Summary: | 碩士 === 逢甲大學 === 機械工程學所 === 98 === A micro bow shape structure by silicon based micromachining is designed and analyzed in this thesis. The devices are fabricated by MEMS process.
In this study, deflections of micro bow shape structure with different dimensions under various loads are investigated. In this work, micro bow shape structure with different sizes s fabricated by silicon based surface micromachining. An equipment called MTS (Micro Test System) Tytron 250 is used to measure deflection of bow shape micro structure under various loads. The results of the measurements show that length is the most important factor of affecting deformation. Under the same load, it is found that the shorter length of the bow shape structure would induce larger deformation. And the wider beam size of bow structure would induce smaller displacement and displacement.
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