Fabrication and DeformationAnalysis of Micro Bow ShapeStructure
碩士 === 逢甲大學 === 機械工程學所 === 98 === A micro bow shape structure by silicon based micromachining is designed and analyzed in this thesis. The devices are fabricated by MEMS process. In this study, deflections of micro bow shape structure with different dimensions under various loads are investigat...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/11957057163481525088 |