Taguchi experiments analysis, qualities measurement and thickness control by fuzzy control law for TiN films
碩士 === 清雲科技大學 === 機械工程所 === 98 === In this paper, the TiN optimel experiment is using the Taguchi method to get the best parameter for pulsed-DC magnetron sputter system, us the fixed current, fixture rotation, temperature, and the parameters of worki0ng distance and angles that select the level f...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66881978554562502984 |