Dynamic Analysis for a Piezo-driven Microstage Structure

• Main Authors: Bo-Jun Huang, 黃柏鈞
• Other Authors: Yung Ting
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/66425857317861858993

碩士 === 中原大學 === 光機電及資電控產業研發碩士專班 === 98 === Abstract The purpose of this study is to discuss the structural rigidity and dynamic analysis of high-frequency nanoscale cutting system. Nanoscale cutting system contains three substructures, includes fixed tools base, micro positioning stage and ball screw stage. ANSYS software with the finite element method is used to analyze each substructure separately and complete nanoscale cutting structure. Resonant frequency, mode shape, dynamic stiffness and dynamic analysis are investigated and discussed. Modal analysis is carried out by using Block Lanczos Method to create the model. The rate of decay of oscillation of the material is measured from the experiment. Appropriate damping coefficient is found by comparing the simulation and experimental result through transient analysis. Harmonic analysis of Mode Superposition is used to verify the displacement direction of the micro positioning stage with the chosen mode shape that is suitable to piezoelectric actuator, and the structure stiffness of the entire system is satisfactory.