Dynamic Analysis for a Piezo-driven Microstage Structure
碩士 === 中原大學 === 光機電及資電控產業研發碩士專班 === 98 === Abstract The purpose of this study is to discuss the structural rigidity and dynamic analysis of high-frequency nanoscale cutting system. Nanoscale cutting system contains three substructures, includes fixed tools base, micro positioning stage and ball scr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66425857317861858993 |