A Study of Nonlinear Vibration of a MicroelectromechanicalTorsional Oscillator
碩士 === 中原大學 === 機械工程研究所 === 98 === The vibration of a plate under two fixed electrostatic electrodes with being supported by two serpentine springs are considered. When the system in the low excitation voltage , the system is an easy observation of the linear damping oscillator. The nonlinearities c...
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73481906736647375767 |
| Summary: | 碩士 === 中原大學 === 機械工程研究所 === 98 === The vibration of a plate under two fixed electrostatic electrodes with being supported by two serpentine springs are considered. When the system in the low excitation voltage , the system is an easy observation of the linear damping oscillator. The nonlinearities can be tuned by modifying the voltages. Frequency response of the system in this study, the relationship between period and time are determined by using the 4th Runge-Kutta method.
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