A Study of Nonlinear Vibration of a MicroelectromechanicalTorsional Oscillator

碩士 === 中原大學 === 機械工程研究所 === 98 === The vibration of a plate under two fixed electrostatic electrodes with being supported by two serpentine springs are considered. When the system in the low excitation voltage , the system is an easy observation of the linear damping oscillator. The nonlinearities c...

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Bibliographic Details
Main Authors: Tian-Wei Wu, 吳添偉
Other Authors: Shih, Yan-Sh
Format: Others
Language:en_US
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/73481906736647375767