Study of AlN Deposition and the Application for UV Detectors
碩士 === 中原大學 === 電子工程研究所 === 98 === In this thesis, AlN thin film grown on c-sappire using Heclion sputtering system in low temperature(300~500℃)，and in application to fabricated the AlN metal-semiconductor-metal(MSM) photodetector. There were correlations of AlN thin film crystalline, surface m...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74758247257591688811 |