Signal Process Algorithms for White-Light Interferometer of Surface Morphology Measurement
碩士 === 長庚大學 === 機械工程學系 === 98 === Three algorithms were used to process the interference signals of white-light interferometer in order to obtain the surface profile of a sample- the absolute value method (AVM), the envelope method (EM), and the 2nd derivative method (2nd DM). Via a low-pass filter,...
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| Format: | Others |
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2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42635917481175039976 |