Productivity Throughput Prediction Model of Ion Implant Machine by Artificial Neural Network

碩士 === 長庚大學 === 資訊管理學系 === 98 === Semiconductor industry is a capital and technology intensive industry. In order to maintain its competitiveness, semiconductor fabrication companies must continuously invest in advanced processes and equipments to pursue customer demands. How to increase the uti...

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Bibliographic Details
Main Authors: PEI YIN CHU, 朱倍吟
Other Authors: S. W. Lin
Format: Others
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/05530323384163923437