Ti-doped Zinc Tin Oxide Thin Film Transistor
碩士 === 國立中正大學 === 光機電整合工程所 === 98 === In this thesis, we use titanium doped zinc tin oxide (Ti-doped ZTO) transparent thin film as a semiconductor layer to fabricated thin film transistors. To preparing Ti-doped ZTO target to controlled TiO2 content, and used pulsed laser deposition (PLD) system to...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06620977321865715282 |