TSV structure in the development and application of electrical measurement and parameters extraction

碩士 === 國防大學理工學院 === 電子工程碩士班 === 98 === This work focus on developing a suitable extraction and analysis methodology on signal transmitting parameters for a TSV structure, and to study the resistance and current leakage mechanisms on a TSV due to the signal redistribution layer and the through vias....

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Bibliographic Details
Main Authors: Tu,che-Min, 涂哲旻
Other Authors: Lee,Chih-Yuan
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/28668443969062645042