A Preliminary Study of Microwave Plasma Torch Reactor Apply to the Decomposition of the Tail Gas of Semiconductor Manufacturing Process
碩士 === 國立雲林科技大學 === 環境與安全工程系碩士班 === 97 === The greenhouse effect is one of the most important topics that the whole world cares about recent years. The main reason of the greenhouse effect on earth is mainly because the massive usage of petrochemical fuels by human beings and emit large amounts of...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88561157645193078036 |