The study on fabrication and application of different annealing mechanism to aluminum doped zinc-oxide
碩士 === 國立雲林科技大學 === 光學電子工程研究所 === 97 === In this study, we try to fabricate a novel transparent conducting thin film, AZO by RF sputter, and apply it into organic light emiting diode. We want it to replace ITO because the shortage will happen soon. At first, we led argon 10 sccm into the chamber, th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31175401876742401816 |