Effects of nitrogen content and nitrogen plasma post-treatment on diamond-like carbon films
碩士 === 大同大學 === 材料工程學系(所) === 97 === 英文摘要 Diamond-like carbon (DLC) films were deposited on silicon substrate using acetylene as carbon source by RF plasma enhanced chemical vapor deposition (RF-PECVD). The deposition at different acetylene/nitrogen ratios, different plasma post-treatment atmosp...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35028240452638635714 |