Investigation of Fabricating Micro Structures on Diamond Film by Reactive Ion Etching
碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 97 === Diamond has many excellent physical, chemical, mechanical, optical, thermal, and electrical properties such as high hardness, extreme chemical inertness, low friction coefficient, wide optical transparency bandwidth, high thermal conductivity, and wide band ga...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/31221966344643560343 |