| Summary: | 碩士 === 國立臺北科技大學 === 電資碩士班 === 97 === When flat panel equipment vendor develop TFT-LCD sputtering equipment, their focus is on how to improve process technology. It is easy to ignore the effect of power quality. The equipment might not operate normally due to the effect. In order to judge if we suffer from power quality problem, we build a Fourier series mathematical model by Mathcad. We could analyze the harmonic voltage and current caused by the sputter machine of TFT-LCD via the mathematic model. Most of TFT-LCD manufacture installed big scale sputtering equipment. And they suffer from similar power quality problem during installation. Those could cost a lot for both equipment vendor and TFT-LCD manufacture. It is necessary to deeply understand the problem and improve the level of the effect. We proved that the harmonic and 3 phase unbalance are critical problem by measuring the field data. We should analysis those harmonic and 3 phase unbalance field data.
We could analyze the harmonic contents and the 3 phase unbalance by using the mathematical model of this article. We could judge if we improve harmonic and 3 phase unbalance situation from field data according to the requirement of power system and production specification. There is no compliance for low voltage power system in Taiwan. The author could only improve the condition upon the production equipment specification. When it is necessary to improve, we use 2nd order harmonic damping filter as solution for Sputtering equipment. In addition to consider harmonics improvement, the limit space is also a big challenge. The 2nd order harmonic damping filter could meet both requirements. With regard to 3 phase unbalance problem, it is necessary to do transposition in the field.
Finally we collected 2 practical cases in this thesis. We proved that the analysis method that we mentioned in this article is useful via those practical cases. And we verified if we solve the problem by installing harmonic damping filter and transposition power cable via the same mathematical model.
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