Diagnostic and Improvement for Harmonics and 3 Phase Unbalance Problem on Sputter Equipment of TFT-LCD
碩士 === 國立臺北科技大學 === 電資碩士班 === 97 === When flat panel equipment vendor develop TFT-LCD sputtering equipment, their focus is on how to improve process technology. It is easy to ignore the effect of power quality. The equipment might not operate normally due to the effect. In order to judge if we suffe...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/36pv6h |