A Study of Design and Fabrication of MEMS Probe Card by CMOS-MEMS Processes
碩士 === 國立臺北科技大學 === 機電整合研究所 === 97 === In the study, we use 0.35μm CMOS-MEMS to design cantilever probe card, with through-silicon interconnections for IC testing. CMOS process provides multi-layer interconnections, which could assist the connection between the probe head the external devices, and r...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8u38y7 |