Sb-doped P-type ZnO Thin Films Fabricated by RF Magnetron Sputtering
碩士 === 國立臺北科技大學 === 光電工程系研究所 === 97 === We investigated the Sb-doping effects on ZnO thin films using RF (radio frequency) magnetron sputtering and post thermal annealing. The structural and electronic properties of the thin films were measured by X-ray diffraction, SEM (scanning electron microscope...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8fhh82 |