Fault Detection in TFT-LCD Manufacturing Using FTPCA

碩士 === 東海大學 === 資訊工程與科學系碩士在職專班 === 97 === In Semiconductor manufacturing industry, Advanced Process Control (APC) is a vital practice for enhancing yield and reducing the production cost. Recently, Thin Film Transistor Liquid Crystal Display (TFT-LCD) industry has tried implementing APC and is expec...

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Bibliographic Details
Main Authors: Cheng-Chin Yang, 楊政欽
Other Authors: 許玟斌
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/37249184241426397262