Fault Detection in TFT-LCD Manufacturing Using FTPCA
碩士 === 東海大學 === 資訊工程與科學系碩士在職專班 === 97 === In Semiconductor manufacturing industry, Advanced Process Control (APC) is a vital practice for enhancing yield and reducing the production cost. Recently, Thin Film Transistor Liquid Crystal Display (TFT-LCD) industry has tried implementing APC and is expec...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/37249184241426397262 |