Development of the technologies for long-stroke nano-stage
碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 97 === Abstract This paper presents the design, analysis and assembly of a long-stroke nano-stage with 3-DOF dual-frequency interferometer feedback using 3-DOF PZT stage control system. This nano-stage integrates a H-type dual-axis long-stroke stage of air be...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/hdz3r2 |