Shape and Thermal Effects of Metal Films on Stress-Induced Bending of Surface Micromachined Curved Grating
碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 97 === Micro-gratings have been widely used in a variety of micro-opto-electro-mechanical systems (MOEMS) applications. In this study, the shape and thermal effects of metal films on the stress-induced bending of micromachined curved grating are systematically inve...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/dc47qy |