The Study of ZnO thin film gas sensors activation by UV light

碩士 === 國立高雄大學 === 電機工程學系--先進電子構裝技術產業研發碩 === 97 === In this dissertation, the nano structured Zinc Oxide (ZnO) was achieved by the thermally evaporated Zinc (Zn) on sapphire substrate followed by suitable thermal treatment. The resistance for the film was studied under different oxygen and nitrogen g...

Full description

Bibliographic Details
Main Authors: Kuan-Ting Chen, 陳冠廷
Other Authors: Wen-How Lan
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/65272214137911850271