A new quality strategy for in-line quality control and defect inspection by the virtual process in semiconductor wafer fabrication
博士 === 國立臺灣科技大學 === 管理研究所 === 97 === The in-line quality control (QC) measured data plays an increasingly important role in both the control and the improvement of yields in the production process of semiconductor manufacturing, especially in 300mm semiconductor factories. Thus a breakthrough in the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94135284639381109215 |