Growth and characterization of well aligned densely packed R-TiO2 and RuO2/R-TiO2 hetero nanocrystals via reactive magnetron sputtering

• Main Authors: Chien-nan Yeh, 葉建男
• Other Authors: Ying-Sheng Huang
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/00300791048863497088

碩士 === 國立臺灣科技大學 === 電子工程系 === 97 === We report the growth of well-aligned densely-packed rutile phase TiO2 (R-TiO2) nanocrystals (NCs) and RuO2/R-TiO2 heteronanostructures on sapphire SA(100), SA(012), and LTO(012) substrates via reactive magnetron sputtering using Ti and Ru metal targets under different conditions. The surface morphology, structural and spectroscopic properties of the as-deposited NCs are characterized using field-emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and micro-Raman spectroscopy. FESEM micrographs reveal the growth of vertically aligned TiO2 NCs on SA(100), whereas the NCs on the SA(012) and LTO(012) are grown with a tilt angle of ~33�a from the normal to substrates. The XRD results show that rutile phase TiO2 NCs with either (001) orientation on SA(100) substrate or (101) orientation on SA(012)/ LTO(012) substrates. A strong substrate effect on the alignment of the TiO2 NCs growth is demonstrated and the probable mechanism for the formation of these NCs is discussed. XPS analyses show an oxygen vs. titanium ratio of 2.0 ± 0.1 for the as-grown TiO2 NCs. Raman spectra of R-TiO2 NCs exhibit a slight redshift in the peak position and a small broadening in linewidth with respect to that of the bulk counterpart. FESEM micrographs and XRD patterns of RuO2/R-TiO2 heteronanostructures indicate that the growth of coexistence of vertically aligned RuO2(001) and twinned V-shaped RuO2(101) NCs on top of R-TiO2 NCs. The probable mechanisms for the formation of well-aligned RuO2 NCs on top of R-TiO2 NCs are discussed.