Growth and characterization of well aligned densely packed R-TiO2 and RuO2/R-TiO2 hetero nanocrystals via reactive magnetron sputtering

碩士 === 國立臺灣科技大學 === 電子工程系 === 97 === We report the growth of well-aligned densely-packed rutile phase TiO2 (R-TiO2) nanocrystals (NCs) and RuO2/R-TiO2 heteronanostructures on sapphire SA(100), SA(012), and LTO(012) substrates via reactive magnetron sputtering using Ti and Ru metal targets under diff...

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Bibliographic Details
Main Authors: Chien-nan Yeh, 葉建男
Other Authors: Ying-Sheng Huang
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/00300791048863497088