Novel fabrication process of patterns composing by gold Nanoparticle thin films on silicon wafer
碩士 === 國立臺灣科技大學 === 高分子系 === 97 === This study is focuses on the fabrication process of patterns composing by gold nanoparticle thin films on silicon wafer. In this work, Au nanoparticles are prepared by two-phase method; secondly, we patterned on silicon wafer by electron beam lithography and then...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91340880081487489672 |