Synthesis and characteristic of the silicon-based nanostructure
碩士 === 國立臺灣科技大學 === 光電工程研究所 === 97 === In this research, the silica nanowires (SiOx NWs) were synthesized on silicon substrate via a thin gold catalytic reaction by the thermal chemical vapor deposition system. The XeF excimer laser with different energy was adapted as the pretreatment and post-trea...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83108432480455178326 |