Evaluation of the impact of inorganic acids on air quality emitted from the semiconductor manufacturing using dispersion modeling and geographic information system
碩士 === 國立臺灣大學 === 環境衛生研究所 === 97 === Semiconductor manufacturing industries contribute a lot to the economic growth in Taiwan. However, the semiconductor manufacturing processes use a large amount of inorganic acids, such as sulfuric acid, nitric acid, hydrogen fluoride, and hydrogen chloride. The e...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98528689920758628356 |