Application of Taguchi Method in Wear Analysis of Latching Mechanism For the Wafer Container Door

碩士 === 國立臺灣大學 === 機械工程學研究所 === 97 === The purpose of this study is to investigate the wear of the latching mechanism used in the wafer container door. The wafer container provides the wafers a highly clean mini-environment for storage and transporting such that they will not be contaminated during...

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Bibliographic Details
Main Authors: Yao-Zhin Lin, 林耀馨
Other Authors: Jyh-Jone Lee
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/74809290552480003034