Fabrication and characteristic study of silicon tip arrays for electron beam lithography
博士 === 國立臺灣大學 === 機械工程學研究所 === 97 === This dissertation discusses the fabrication of sharp n-type silicon tip arrays for the e-beam source to be used in a massively parallel direct-write electron-beam system. The sharp silicon tip array is essential to produce high emission current. The fabrication...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/20310569783300333997 |