Ultrasonic Assisted Mechanochemical Polishing of Silicon Carbide
碩士 === 國立臺灣大學 === 機械工程學研究所 === 97 === Silicon carbide (SiC) ceramic had been wildly used in wear and corrosion resistance because of excellent mechanical and chemical properties. For the past few years, it was also used in optical component and semi-conductor industry, and therefore been requested i...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28627175643350653164 |