Compact Representation of Optical Proximity Correction Geometry Based on Fourier Descriptor Method
碩士 === 國立臺灣大學 === 電子工程學研究所 === 97 === The geometry complexity of Optical Proximity Corrected (OPC) Mask and the aerial image are often overwhelming. To speed up the processing time of mask development, OPC quality assurance, and data storage, compact representation of the OPC mask and aerial image a...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/78365521696514711824 |
| Summary: | 碩士 === 國立臺灣大學 === 電子工程學研究所 === 97 === The geometry complexity of Optical Proximity Corrected (OPC) Mask and the aerial image are often overwhelming. To speed up the processing time of mask development, OPC quality assurance, and data storage, compact representation of the OPC mask and aerial image are of great importance.
In this thesis, we proposed a novel compact representation method based on the fourier descriptor (FD) method. FD is a widely used contour representation method for image processing. Our experimental result show that more than 5x reduction ratio of the data volume are observed with minor errors. To the best of authors knowledge, FD is applied
to OPC data representation in the first time.
|
|---|