Compact Representation of Optical Proximity Correction Geometry Based on Fourier Descriptor Method
碩士 === 國立臺灣大學 === 電子工程學研究所 === 97 === The geometry complexity of Optical Proximity Corrected (OPC) Mask and the aerial image are often overwhelming. To speed up the processing time of mask development, OPC quality assurance, and data storage, compact representation of the OPC mask and aerial image a...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78365521696514711824 |