Investigatng the influence of sputtering parameters on the formation of FePt(001) and CoPt (001) thin films
碩士 === 國立臺灣大學 === 材料科學與工程學研究所 === 97 === In this study, the dependence of sputtering parameters on the formation of FePt(001) and CoPt(001) films was investigated. Two series of samples with the structures of Fe48Pt52(20 nm)/Pt(2 nm)/Cr91Ru9(120 nm)/glass substrate and CoPt(50 nm)/Pt(0 ~ 2 nm)/MgO(0...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/26941290367620102414 |