Dynamic Optical Microscopy Observations for the Surface Blistering Developed by Co-Implanted Hydrogen and Helium Ions in Silicon

Dynamic Optical Microscopy Observations for the Surface Blistering Developed by Co-Implanted Hydrogen and Helium Ions in Silicon

碩士 === 國立清華大學 === 工程與系統科學系 === 97 ===

Bibliographic Details
Main Authors: Hsieh, Hsin-Yuan, 謝欣媛
Other Authors: Liang, Jenq-Horng
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/33174263832403371277
id ndltd-TW-097NTHU5593057
record_format oai_dc
spelling ndltd-TW-097NTHU55930572015-11-09T04:04:27Z http://ndltd.ncl.edu.tw/handle/33174263832403371277 Dynamic Optical Microscopy Observations for the Surface Blistering Developed by Co-Implanted Hydrogen and Helium Ions in Silicon 動態光學顯微分析兩階段氫氦離子佈植於矽所引發之表面發泡現象 Hsieh, Hsin-Yuan 謝欣媛 碩士 國立清華大學 工程與系統科學系 97 Liang, Jenq-Horng 梁正宏 2009 學位論文 ; thesis 76 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立清華大學 === 工程與系統科學系 === 97 ===
author2 Liang, Jenq-Horng
author_facet Liang, Jenq-Horng
Hsieh, Hsin-Yuan
謝欣媛
author Hsieh, Hsin-Yuan
謝欣媛
spellingShingle Hsieh, Hsin-Yuan
謝欣媛
Dynamic Optical Microscopy Observations for the Surface Blistering Developed by Co-Implanted Hydrogen and Helium Ions in Silicon
author_sort Hsieh, Hsin-Yuan
title Dynamic Optical Microscopy Observations for the Surface Blistering Developed by Co-Implanted Hydrogen and Helium Ions in Silicon
title_short Dynamic Optical Microscopy Observations for the Surface Blistering Developed by Co-Implanted Hydrogen and Helium Ions in Silicon
title_full Dynamic Optical Microscopy Observations for the Surface Blistering Developed by Co-Implanted Hydrogen and Helium Ions in Silicon
title_fullStr Dynamic Optical Microscopy Observations for the Surface Blistering Developed by Co-Implanted Hydrogen and Helium Ions in Silicon
title_full_unstemmed Dynamic Optical Microscopy Observations for the Surface Blistering Developed by Co-Implanted Hydrogen and Helium Ions in Silicon
title_sort dynamic optical microscopy observations for the surface blistering developed by co-implanted hydrogen and helium ions in silicon
publishDate 2009
url http://ndltd.ncl.edu.tw/handle/33174263832403371277
work_keys_str_mv AT hsiehhsinyuan dynamicopticalmicroscopyobservationsforthesurfaceblisteringdevelopedbycoimplantedhydrogenandheliumionsinsilicon
AT xièxīnyuàn dynamicopticalmicroscopyobservationsforthesurfaceblisteringdevelopedbycoimplantedhydrogenandheliumionsinsilicon
AT hsiehhsinyuan dòngtàiguāngxuéxiǎnwēifēnxīliǎngjiēduànqīnghàilízibùzhíyúxìsuǒyǐnfāzhībiǎomiànfāpàoxiànxiàng
AT xièxīnyuàn dòngtàiguāngxuéxiǎnwēifēnxīliǎngjiēduànqīnghàilízibùzhíyúxìsuǒyǐnfāzhībiǎomiànfāpàoxiànxiàng
_version_ 1718126580324106240

Similar Items