Dynamic Optical Microscopy Observations for the Surface Blistering Developed by Co-Implanted Hydrogen and Helium Ions in Silicon
碩士 === 國立清華大學 === 工程與系統科學系 === 97 ===
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/33174263832403371277 |